Technique overview
The following table gives an overview of the techniques available at ELMICAU and the corresponding properties they can measure, alongside the best resolution that can be reached.
|
elemental composition |
morphology | surface topology | magnetic structure | chemical map | crystalline structure | special | |||
| 2D | 3D | 2D | 3D | ||||||
| TEM imaging |
< 0.1 nm |
strain/stress | |||||||
| TEM/STEM diffraction | < 1 nm | ||||||||
| TEM Lorentz mode | < 10 nm | ||||||||
|
HAADF (STEM) |
< 0.1 nm | ||||||||
| EELS (TEM/STEM) | < 0.1 nm | < 0.1 nm | |||||||
| EDX (TEM/STEM) | < 0.1 nm | ||||||||
| HRSTEM imaging | < 0.1 nm | < 0.1 nm | |||||||
| DPC (STEM) | < 10 nm |
E-fields: < 0,1 nm |
|||||||
| Lorentz-STEM (Cs-corrected) | < 1 nm | ||||||||
| SE (SEM) | < 5 nm | large-scale images possible | |||||||
| BSE (SEM) | < 10 nm | ||||||||
| EDX (SEM) | < 50 nm | ||||||||
| EBSD (SEM) | < 20 nm | grain orientation | |||||||
| Auger (AES) | < 5 nm | ||||||||
| TEM/STEM tomography | < 10 nm | < 10 nm | |||||||
| FIB tomography | < 100 nm | < 100 nm | |||||||
| Auger tomography | < 5 nm |
< 5 nm |
|||||||
Elemental composition: differentiation between different elements.
Morphology: the physical texture of the sample, i.e. granular, single-crystalline, amorphous, etc.
Surface topology: the texture of the sample surface.
Magnetic structure: magnetic domains or domain walls, spin structures like vortices or skyrmions.
Chemical map: differentiation between different elements and their chemical state, e.g. different oxidation levels.
Crystalline structure: Bravais lattice and lattice constants.