The Auger microscope is a scanning electron microscope (SEM) with a hemispherical analyzer for Auger electron spectroscopy (AES). It analyzes the energies of the Auger electrons (AE) that are released from the surface of the investigated specimen via the Auger-Meitner-effect. Because the energy of the AE is specific for each element, an elemental map of the specimen can thus be created. The AE can only escape from the topmost 1-3 nm of the sample due to their low energy, so AES is a very surface-sensitive technique.

The microscope is additionally equipped with a focused Ar sputter gun. This can be used to remove the surface layer of the specimen, after which the newly uncovered area can be investigated with AES. This procedure can be repeated for automated depth profiling, creating a three-dimensional image of the sample structure.

The Auger-Meitner-effect is less prominent for heavier elements, for which the emission of X-rays is more likely. Accordingly, AES is mostly suited to investigate lighter elements. To better measure heavier elements, the AES measurement can be combined with an X-ray photoelectron spectroscopy (XPS) analysis.