The spectrometer (Shimadzu EDX-720) is used for rapid determination of film thickness and elemental composition of the films. Elements, heavier than sodium (Z = 11) can be detected. The analysed area can be chosen between 1 mm to 10 mm diameter. Therefore, the distribution of elements over the sample area can be determined. The sample size can be up to 300 mm diameter and 150 mm height, so it is also possible to analyse bulk, powder, or liquid samples.