The high temperature Seebeck and resistivity setup (HTS) is used for the electrical characterization of thermoelectric thin film samples between room temperature and 450°C under vacuum conditions or an nitrogen atmosphere. The determination of the electrical conductivity the Van der Pauw technique is used for samples with a size of (10±2) mm × (10±2) mm. The Seebeck coefficient is done in a two-point-configuration in order to minimize the error of the temperature measurement. Here the sample size is in the range of (14±9) mm×(5±2) mm.